Edwards nXDS 渦卷幫浦為什麼啟動幾分鐘後跳 overload alarm？

H1 · Process load

Vent 過的腔體正在用水氣餵幫浦，把它壓在持續高壓，直到 controller 超時。

• “If the pump has been used to pump condensable vapours or is to pump a large chamber that has been exposed to atmospheric air (water vapour), it may be necessary to run for at least an hour on gas ballast.”

  Section 5.11.2, page 32

• “If atmospheric moisture is present, run the pump with gas ballast on for 20 minutes before turning gas ballast off. If moisture is allowed to remain, the performance of the pump will be impaired.”

  Section 4.8, page 27

推論： 「水氣負載導致 overload 跳機」這個連結是推論：手冊用「constant high pressure」描述 overload 的對策（Table 16），又另外告訴你 vent 過的腔體需要開 gas ballast 跑至少一小時（5.11.2）。把兩件事接起來是調查，不是文件。

H2 · Exhaust path

排氣管路或抽風受阻，幫浦頂著背壓工作。

• “There is high pressure or a blockage in the exhaust line.”

  Section 5.11.2, page 32, listed as a cause of failed performance

• “Ensure that the exhaust extraction system cannot become blocked or obstructed when the pump is operating.”

  Section 3.5, page 18

• “A small amount of tip seal wear product may collect in the exhaust duct of the pump. The dust may be blown out with the initial burst of air after the pump has been vented.”

  Section 3.5, page 18

H3 · Vacuum integrity

保養動作引入了洩漏，幫浦一直在高壓下運轉。

• “There is a leak in the system.”

  Section 5.11.2, page 32

• “Leak test the system and seal any leaks found after pump installation.”

  Section 3.5, page 19

推論： 這裡的證據是時間點：症狀從有人動過系統之後開始。這個相關性只是旁證，被當旁證對待；check 5 才能把它變成是或不是。

H4 · Thermal and cooling

散熱出了問題（風扇、間隙或環境溫度），過熱的幫浦把這件事折進跳機裡。

• “The fan is not working or is not connected.”

  Section 5.11.1, page 32, among causes of a pump that has stopped

• “If the pump will be located inside an enclosure, ensure that there is adequate ventilation at both ends of the pump, so that the ambient temperature around the pump does not exceed 40 °C. There must be a minimum space of 25 mm between the pump and the enclosure walls.”

  Section 3.4, page 17

• “If the pump is operated outside the specified limits, then the pump housing may become hot; the controller may reduce the motor speed; and tip seal wear rate will be increased.”

  Section 2.2, note, page 7

推論： 手冊沒有說降速會以 overload 或 acceleration timeout 收場；這個耦合是從 controller 行為的註記推論出來的，照規則標為推論。

H5 · Electrical supply

幫浦端的供電電壓在負載下垂到規格以外。

• “If the electrical supply voltage is more than 10% below the lowest voltage specified on the user interface panel, the pump may operate but deliver a degraded vacuum performance.”

  Section 5.11.2, page 32

• “Electrical ratings for continuous operation: 100 to 127 V input, 10 A rms; 200 to 240 V input, 6 A rms.”

  Section 2.4, Table 8, page 11, condensed from the table

H6 · Mechanical wear

軸承或 tip seal 到了或過了保養點，馬達要扛的負載變大。

• “Bearing wear cannot necessarily be detected under normal operating conditions.”

  Section 5.7, page 31

• “Tip seals may need further run-in, typically 24 hours, with some requiring up to a maximum of 100 hours.”

  Section 5.11.2, page 32, relevant if seals were recently replaced

推論： 「磨耗把馬達負載推到 overload 跳機」是推論；手冊裡磨耗的證據是透過 service indicator 和效能檢查來的，所以 check 1 要求兩顆燈都讀。